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Low Temperature Synthesis of High-Density Carbon Nanotubes on Insulating Substrate
A method to synthesize high-density, vertically-aligned, multi-wall carbon nanotubes (MWCNTs) on an insulating substrate at low temperature using a complementary metal–oxide–semiconductor (CMOS) compatible process is presented. Two factors are identified to be important in the carbon nanotube (CNT)...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6474185/ https://www.ncbi.nlm.nih.gov/pubmed/30901961 http://dx.doi.org/10.3390/nano9030473 |
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author | Xiao, Ying Ahmed, Zubair Ma, Zichao Zhou, Changjian Zhang, Lining Chan, Mansun |
author_facet | Xiao, Ying Ahmed, Zubair Ma, Zichao Zhou, Changjian Zhang, Lining Chan, Mansun |
author_sort | Xiao, Ying |
collection | PubMed |
description | A method to synthesize high-density, vertically-aligned, multi-wall carbon nanotubes (MWCNTs) on an insulating substrate at low temperature using a complementary metal–oxide–semiconductor (CMOS) compatible process is presented. Two factors are identified to be important in the carbon nanotube (CNT) growth, which are the catalyst design and the substrate material. By using a Ni–Al–Ni multilayer catalyst film and a ZrO(2) substrate, vertically-aligned CNTs can be synthesized at 340 °C using plasma-enhanced chemical vapor deposition (PECVD). Both the quality and density of the CNTs can be enhanced by increasing the synthesis temperature. The function of the aluminum interlayer in reducing the activation energy of the CNT formation is studied. The nanoparticle sintering and quick accumulation of amorphous carbon covering the catalyst can prematurely stop CNT synthesis. Both effects can be suppressed by using a substrate with a high surface energy such as ZrO(2). |
format | Online Article Text |
id | pubmed-6474185 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-64741852019-05-01 Low Temperature Synthesis of High-Density Carbon Nanotubes on Insulating Substrate Xiao, Ying Ahmed, Zubair Ma, Zichao Zhou, Changjian Zhang, Lining Chan, Mansun Nanomaterials (Basel) Article A method to synthesize high-density, vertically-aligned, multi-wall carbon nanotubes (MWCNTs) on an insulating substrate at low temperature using a complementary metal–oxide–semiconductor (CMOS) compatible process is presented. Two factors are identified to be important in the carbon nanotube (CNT) growth, which are the catalyst design and the substrate material. By using a Ni–Al–Ni multilayer catalyst film and a ZrO(2) substrate, vertically-aligned CNTs can be synthesized at 340 °C using plasma-enhanced chemical vapor deposition (PECVD). Both the quality and density of the CNTs can be enhanced by increasing the synthesis temperature. The function of the aluminum interlayer in reducing the activation energy of the CNT formation is studied. The nanoparticle sintering and quick accumulation of amorphous carbon covering the catalyst can prematurely stop CNT synthesis. Both effects can be suppressed by using a substrate with a high surface energy such as ZrO(2). MDPI 2019-03-21 /pmc/articles/PMC6474185/ /pubmed/30901961 http://dx.doi.org/10.3390/nano9030473 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Xiao, Ying Ahmed, Zubair Ma, Zichao Zhou, Changjian Zhang, Lining Chan, Mansun Low Temperature Synthesis of High-Density Carbon Nanotubes on Insulating Substrate |
title | Low Temperature Synthesis of High-Density Carbon Nanotubes on Insulating Substrate |
title_full | Low Temperature Synthesis of High-Density Carbon Nanotubes on Insulating Substrate |
title_fullStr | Low Temperature Synthesis of High-Density Carbon Nanotubes on Insulating Substrate |
title_full_unstemmed | Low Temperature Synthesis of High-Density Carbon Nanotubes on Insulating Substrate |
title_short | Low Temperature Synthesis of High-Density Carbon Nanotubes on Insulating Substrate |
title_sort | low temperature synthesis of high-density carbon nanotubes on insulating substrate |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6474185/ https://www.ncbi.nlm.nih.gov/pubmed/30901961 http://dx.doi.org/10.3390/nano9030473 |
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