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Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes †
This paper presents a method to simultaneously determine the thickness and permittivity of thin layers from multi-frequency reflection coefficient measurements using an open-ended coaxial probe. This is achieved by exploiting that the probe becomes radiating at frequencies higher than the probe’s ty...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6514552/ https://www.ncbi.nlm.nih.gov/pubmed/31013859 http://dx.doi.org/10.3390/s19081765 |