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Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes †

This paper presents a method to simultaneously determine the thickness and permittivity of thin layers from multi-frequency reflection coefficient measurements using an open-ended coaxial probe. This is achieved by exploiting that the probe becomes radiating at frequencies higher than the probe’s ty...

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Detalles Bibliográficos
Autores principales: Folgerø, Kjetil, Haukalid, Kjetil, Kocbach, Jan, Peterson, Andreas Soto
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6514552/
https://www.ncbi.nlm.nih.gov/pubmed/31013859
http://dx.doi.org/10.3390/s19081765