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Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses

Minimizing conductive heat losses in Micro-Electro-Mechanical-Systems (MEMS) thermal (hot-film) flow sensors is the key to minimize the sensors’ power consumption and maximize their sensitivity. Through a comprehensive review of literature on MEMS thermal (calorimetric, time of flight, hot-film/hot-...

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Detalles Bibliográficos
Autores principales:	Mehmood, Zahid, Haneef, Ibraheem, Ali, Syed Zeeshan, Udrea, Florin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6515211/ https://www.ncbi.nlm.nih.gov/pubmed/31003507 http://dx.doi.org/10.3390/s19081860

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