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NO gas sensor based on ZnGa(2)O(4) epilayer grown by metalorganic chemical vapor deposition
A gas sensor based on a ZnGa(2)O(4)(ZGO) thin film grown by metalorganic chemical vapor deposition operated under the different temperature from 25 °C to 300 °C is investigated in this study. This sensor shows great sensing properties at 300 °C. The sensitivity of this sensor is 22.21 as exposed to...
Autores principales: | Wu, Min-Ru, Li, Wei-Zhong, Tung, Chun-Yi, Huang, Chiung-Yi, Chiang, Yi-Hung, Liu, Po-Liang, Horng, Ray-Hua |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6522479/ https://www.ncbi.nlm.nih.gov/pubmed/31097726 http://dx.doi.org/10.1038/s41598-019-43752-z |
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