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Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators

The development of new compliant resonant microsystems and the trend towards further miniaturization have recently raised the issue of the accuracy and reliability of computational tools for the estimation of fluid damping. Focusing on electrostatically actuated torsional micro-mirrors, a major diss...

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Detalles Bibliográficos
Autores principales: Mirzazadeh, Ramin, Mariani, Stefano
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523271/
https://www.ncbi.nlm.nih.gov/pubmed/31010138
http://dx.doi.org/10.3390/mi10040263

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