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Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode
This paper describes an input shaping method based on an experimental transfer function to effectively obtain a desired scan output for an electrostatic microscanner driven in a quasistatic mode. This method features possible driving extended to a higher frequency, whereas the conventional control n...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523534/ https://www.ncbi.nlm.nih.gov/pubmed/30934767 http://dx.doi.org/10.3390/mi10040217 |
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author | Kim, Kwanghyun Moon, Seunghwan Kim, Jinhwan Park, Yangkyu Lee, Jong-Hyun |
author_facet | Kim, Kwanghyun Moon, Seunghwan Kim, Jinhwan Park, Yangkyu Lee, Jong-Hyun |
author_sort | Kim, Kwanghyun |
collection | PubMed |
description | This paper describes an input shaping method based on an experimental transfer function to effectively obtain a desired scan output for an electrostatic microscanner driven in a quasistatic mode. This method features possible driving extended to a higher frequency, whereas the conventional control needs dynamic modeling and is still ineffective in mitigating harmonics, sub-resonances, and/or higher modes. The performance of the input shaping was experimentally evaluated in terms of the usable scan range (USR), and its application limits were examined with respect to the optical scan angle and frequency. The experimental results showed that the usable scan range is as wide as 96% for a total optical scan angle (total OSA) of up to 9° when the criterion for scan line error is 1.5%. The usable scan ranges were degraded for larger total optical scan angles because of the nonlinear electrostatic torque with respect to the driving voltage. The usable scan range was 90% or higher for most frequencies up to 160 Hz and was drastically decreased for the higher driving frequency because fewer harmonics are included in the input shaping process. Conclusively, the proposed method was experimentally confirmed to show good performance in view of its simplicity and its operable range, quantitatively compared with that of the conventional control. |
format | Online Article Text |
id | pubmed-6523534 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-65235342019-06-03 Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode Kim, Kwanghyun Moon, Seunghwan Kim, Jinhwan Park, Yangkyu Lee, Jong-Hyun Micromachines (Basel) Article This paper describes an input shaping method based on an experimental transfer function to effectively obtain a desired scan output for an electrostatic microscanner driven in a quasistatic mode. This method features possible driving extended to a higher frequency, whereas the conventional control needs dynamic modeling and is still ineffective in mitigating harmonics, sub-resonances, and/or higher modes. The performance of the input shaping was experimentally evaluated in terms of the usable scan range (USR), and its application limits were examined with respect to the optical scan angle and frequency. The experimental results showed that the usable scan range is as wide as 96% for a total optical scan angle (total OSA) of up to 9° when the criterion for scan line error is 1.5%. The usable scan ranges were degraded for larger total optical scan angles because of the nonlinear electrostatic torque with respect to the driving voltage. The usable scan range was 90% or higher for most frequencies up to 160 Hz and was drastically decreased for the higher driving frequency because fewer harmonics are included in the input shaping process. Conclusively, the proposed method was experimentally confirmed to show good performance in view of its simplicity and its operable range, quantitatively compared with that of the conventional control. MDPI 2019-03-27 /pmc/articles/PMC6523534/ /pubmed/30934767 http://dx.doi.org/10.3390/mi10040217 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Kim, Kwanghyun Moon, Seunghwan Kim, Jinhwan Park, Yangkyu Lee, Jong-Hyun Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode |
title | Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode |
title_full | Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode |
title_fullStr | Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode |
title_full_unstemmed | Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode |
title_short | Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode |
title_sort | input shaping based on an experimental transfer function for an electrostatic microscanner in a quasistatic mode |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523534/ https://www.ncbi.nlm.nih.gov/pubmed/30934767 http://dx.doi.org/10.3390/mi10040217 |
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