Cargando…

Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode

This paper describes an input shaping method based on an experimental transfer function to effectively obtain a desired scan output for an electrostatic microscanner driven in a quasistatic mode. This method features possible driving extended to a higher frequency, whereas the conventional control n...

Descripción completa

Detalles Bibliográficos
Autores principales: Kim, Kwanghyun, Moon, Seunghwan, Kim, Jinhwan, Park, Yangkyu, Lee, Jong-Hyun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523534/
https://www.ncbi.nlm.nih.gov/pubmed/30934767
http://dx.doi.org/10.3390/mi10040217
_version_ 1783419356027289600
author Kim, Kwanghyun
Moon, Seunghwan
Kim, Jinhwan
Park, Yangkyu
Lee, Jong-Hyun
author_facet Kim, Kwanghyun
Moon, Seunghwan
Kim, Jinhwan
Park, Yangkyu
Lee, Jong-Hyun
author_sort Kim, Kwanghyun
collection PubMed
description This paper describes an input shaping method based on an experimental transfer function to effectively obtain a desired scan output for an electrostatic microscanner driven in a quasistatic mode. This method features possible driving extended to a higher frequency, whereas the conventional control needs dynamic modeling and is still ineffective in mitigating harmonics, sub-resonances, and/or higher modes. The performance of the input shaping was experimentally evaluated in terms of the usable scan range (USR), and its application limits were examined with respect to the optical scan angle and frequency. The experimental results showed that the usable scan range is as wide as 96% for a total optical scan angle (total OSA) of up to 9° when the criterion for scan line error is 1.5%. The usable scan ranges were degraded for larger total optical scan angles because of the nonlinear electrostatic torque with respect to the driving voltage. The usable scan range was 90% or higher for most frequencies up to 160 Hz and was drastically decreased for the higher driving frequency because fewer harmonics are included in the input shaping process. Conclusively, the proposed method was experimentally confirmed to show good performance in view of its simplicity and its operable range, quantitatively compared with that of the conventional control.
format Online
Article
Text
id pubmed-6523534
institution National Center for Biotechnology Information
language English
publishDate 2019
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-65235342019-06-03 Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode Kim, Kwanghyun Moon, Seunghwan Kim, Jinhwan Park, Yangkyu Lee, Jong-Hyun Micromachines (Basel) Article This paper describes an input shaping method based on an experimental transfer function to effectively obtain a desired scan output for an electrostatic microscanner driven in a quasistatic mode. This method features possible driving extended to a higher frequency, whereas the conventional control needs dynamic modeling and is still ineffective in mitigating harmonics, sub-resonances, and/or higher modes. The performance of the input shaping was experimentally evaluated in terms of the usable scan range (USR), and its application limits were examined with respect to the optical scan angle and frequency. The experimental results showed that the usable scan range is as wide as 96% for a total optical scan angle (total OSA) of up to 9° when the criterion for scan line error is 1.5%. The usable scan ranges were degraded for larger total optical scan angles because of the nonlinear electrostatic torque with respect to the driving voltage. The usable scan range was 90% or higher for most frequencies up to 160 Hz and was drastically decreased for the higher driving frequency because fewer harmonics are included in the input shaping process. Conclusively, the proposed method was experimentally confirmed to show good performance in view of its simplicity and its operable range, quantitatively compared with that of the conventional control. MDPI 2019-03-27 /pmc/articles/PMC6523534/ /pubmed/30934767 http://dx.doi.org/10.3390/mi10040217 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Kim, Kwanghyun
Moon, Seunghwan
Kim, Jinhwan
Park, Yangkyu
Lee, Jong-Hyun
Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode
title Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode
title_full Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode
title_fullStr Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode
title_full_unstemmed Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode
title_short Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode
title_sort input shaping based on an experimental transfer function for an electrostatic microscanner in a quasistatic mode
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523534/
https://www.ncbi.nlm.nih.gov/pubmed/30934767
http://dx.doi.org/10.3390/mi10040217
work_keys_str_mv AT kimkwanghyun inputshapingbasedonanexperimentaltransferfunctionforanelectrostaticmicroscannerinaquasistaticmode
AT moonseunghwan inputshapingbasedonanexperimentaltransferfunctionforanelectrostaticmicroscannerinaquasistaticmode
AT kimjinhwan inputshapingbasedonanexperimentaltransferfunctionforanelectrostaticmicroscannerinaquasistaticmode
AT parkyangkyu inputshapingbasedonanexperimentaltransferfunctionforanelectrostaticmicroscannerinaquasistaticmode
AT leejonghyun inputshapingbasedonanexperimentaltransferfunctionforanelectrostaticmicroscannerinaquasistaticmode