A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

This paper reports a novel design for the decoupling of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope is based on piezoelectric aluminum nitride (AlN) film, and the main structure is a mass hung by T-shape beams. A pair of parallel drive electrodes are symmetrically placed on...

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Detalles Bibliográficos
Autores principales: Yang, Jian, Si, Chaowei, Han, Guowei, Zhang, Meng, Ning, Jin, Zhao, Yongmei, Yang, Fuhua, Wang, Xiaodong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523559/
https://www.ncbi.nlm.nih.gov/pubmed/31013854
http://dx.doi.org/10.3390/mi10040244

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523559/
https://www.ncbi.nlm.nih.gov/pubmed/31013854
http://dx.doi.org/10.3390/mi10040244

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