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A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

This paper reports a novel design for the decoupling of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope is based on piezoelectric aluminum nitride (AlN) film, and the main structure is a mass hung by T-shape beams. A pair of parallel drive electrodes are symmetrically placed on...

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Detalles Bibliográficos
Autores principales:	Yang, Jian, Si, Chaowei, Han, Guowei, Zhang, Meng, Ning, Jin, Zhao, Yongmei, Yang, Fuhua, Wang, Xiaodong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523559/ https://www.ncbi.nlm.nih.gov/pubmed/31013854 http://dx.doi.org/10.3390/mi10040244

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