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Design Guidelines for Thermally Driven Micropumps of Different Architectures Based on Target Applications via Kinetic Modeling and Simulations
The manufacturing process and architecture of three Knudsen type micropumps are discussed and the associated flow performance characteristics are investigated. The proposed fabrication process, based on the deposition of successive dry film photoresist layers with low thermal conductivity, is easy t...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523675/ https://www.ncbi.nlm.nih.gov/pubmed/31013999 http://dx.doi.org/10.3390/mi10040249 |