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Fabrication and Characteristics of a SOI Three-Axis Acceleration Sensor Based on MEMS Technology
A silicon-on-insulator (SOI) piezoresistive three-axis acceleration sensor, consisting of four L-shaped beams, two intermediate double beams, two masses, and twelve piezoresistors, was presented in this work. To detect the acceleration vector (a(x), a(y), and a(z)) along three directions, twelve pie...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523759/ https://www.ncbi.nlm.nih.gov/pubmed/30970643 http://dx.doi.org/10.3390/mi10040238 |