Cargando…
Micro-LEGO for MEMS
The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabric...
Autor principal: | |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523840/ https://www.ncbi.nlm.nih.gov/pubmed/31010089 http://dx.doi.org/10.3390/mi10040267 |
_version_ | 1783419427602038784 |
---|---|
author | Kim, Seok |
author_facet | Kim, Seok |
author_sort | Kim, Seok |
collection | PubMed |
description | The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabricated micro/nanoscale materials to assemble structures and devices in a 3D manner without requiring any wet or vacuum processes. Therefore, it complements existing microfabrication and other micro-assembly methods. In this paper, the process components of micro-LEGO, including transfer printing with polymer stamps, material preparation and joining, are summarized. Moreover, recent progress of micro-LEGO within MEMS applications are reviewed by investigating several example devices which are partially or fully assembled via micro-LEGO. |
format | Online Article Text |
id | pubmed-6523840 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-65238402019-06-03 Micro-LEGO for MEMS Kim, Seok Micromachines (Basel) Review The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabricated micro/nanoscale materials to assemble structures and devices in a 3D manner without requiring any wet or vacuum processes. Therefore, it complements existing microfabrication and other micro-assembly methods. In this paper, the process components of micro-LEGO, including transfer printing with polymer stamps, material preparation and joining, are summarized. Moreover, recent progress of micro-LEGO within MEMS applications are reviewed by investigating several example devices which are partially or fully assembled via micro-LEGO. MDPI 2019-04-21 /pmc/articles/PMC6523840/ /pubmed/31010089 http://dx.doi.org/10.3390/mi10040267 Text en © 2019 by the author. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Review Kim, Seok Micro-LEGO for MEMS |
title | Micro-LEGO for MEMS |
title_full | Micro-LEGO for MEMS |
title_fullStr | Micro-LEGO for MEMS |
title_full_unstemmed | Micro-LEGO for MEMS |
title_short | Micro-LEGO for MEMS |
title_sort | micro-lego for mems |
topic | Review |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523840/ https://www.ncbi.nlm.nih.gov/pubmed/31010089 http://dx.doi.org/10.3390/mi10040267 |
work_keys_str_mv | AT kimseok microlegoformems |