Micro-LEGO for MEMS

The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabric...

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Detalles Bibliográficos
Autor principal: Kim, Seok
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523840/
https://www.ncbi.nlm.nih.gov/pubmed/31010089
http://dx.doi.org/10.3390/mi10040267

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523840/
https://www.ncbi.nlm.nih.gov/pubmed/31010089
http://dx.doi.org/10.3390/mi10040267

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