Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded

Deep ultraviolet AlGaN-based nanorod (NR) arrays were fabricated by nanoimprint lithography and top-down dry etching techniques from a fully structural LED wafer. Highly ordered periodic structural properties and morphology were confirmed by scanning electron microscopy and transmission electron mic...

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Detalles Bibliográficos
Autores principales: Ge, Shucheng, Dai, Jiangping, Gao, Na, Lu, Shiqiang, Li, Penggang, Huang, Kai, Liu, Bin, Kang, Junyong, Zhang, Rong, Zheng, Youdou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2019
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6529484/
https://www.ncbi.nlm.nih.gov/pubmed/31115700
http://dx.doi.org/10.1186/s11671-019-3003-1
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author Ge, Shucheng
Dai, Jiangping
Gao, Na
Lu, Shiqiang
Li, Penggang
Huang, Kai
Liu, Bin
Kang, Junyong
Zhang, Rong
Zheng, Youdou
author_facet Ge, Shucheng
Dai, Jiangping
Gao, Na
Lu, Shiqiang
Li, Penggang
Huang, Kai
Liu, Bin
Kang, Junyong
Zhang, Rong
Zheng, Youdou
author_sort Ge, Shucheng
collection PubMed
description Deep ultraviolet AlGaN-based nanorod (NR) arrays were fabricated by nanoimprint lithography and top-down dry etching techniques from a fully structural LED wafer. Highly ordered periodic structural properties and morphology were confirmed by scanning electron microscopy and transmission electron microscopy. Compared with planar samples, cathodoluminescence measurement revealed that NR samples showed 1.92-fold light extraction efficiency (LEE) enhancement and a 12.2-fold internal quantum efficiency (IQE) enhancement for the emission from multi-quantum wells at approximately 277 nm. The LEE enhancement can be attributed to the well-fabricated nanostructured interface between the air and the epilayers. Moreover, the reduced quantum-confined stark effect accounted for the great enhancement in IQE.
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spelling pubmed-65294842019-06-07 Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded Ge, Shucheng Dai, Jiangping Gao, Na Lu, Shiqiang Li, Penggang Huang, Kai Liu, Bin Kang, Junyong Zhang, Rong Zheng, Youdou Nanoscale Res Lett Nano Express Deep ultraviolet AlGaN-based nanorod (NR) arrays were fabricated by nanoimprint lithography and top-down dry etching techniques from a fully structural LED wafer. Highly ordered periodic structural properties and morphology were confirmed by scanning electron microscopy and transmission electron microscopy. Compared with planar samples, cathodoluminescence measurement revealed that NR samples showed 1.92-fold light extraction efficiency (LEE) enhancement and a 12.2-fold internal quantum efficiency (IQE) enhancement for the emission from multi-quantum wells at approximately 277 nm. The LEE enhancement can be attributed to the well-fabricated nanostructured interface between the air and the epilayers. Moreover, the reduced quantum-confined stark effect accounted for the great enhancement in IQE. Springer US 2019-05-21 /pmc/articles/PMC6529484/ /pubmed/31115700 http://dx.doi.org/10.1186/s11671-019-3003-1 Text en © The Author(s). 2019 Open AccessThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
spellingShingle Nano Express
Ge, Shucheng
Dai, Jiangping
Gao, Na
Lu, Shiqiang
Li, Penggang
Huang, Kai
Liu, Bin
Kang, Junyong
Zhang, Rong
Zheng, Youdou
Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded
title Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded
title_full Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded
title_fullStr Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded
title_full_unstemmed Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded
title_short Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded
title_sort optical performance of top-down fabricated algan nanorod arrays with multi-quantum wells embedded
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6529484/
https://www.ncbi.nlm.nih.gov/pubmed/31115700
http://dx.doi.org/10.1186/s11671-019-3003-1
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