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Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded

Deep ultraviolet AlGaN-based nanorod (NR) arrays were fabricated by nanoimprint lithography and top-down dry etching techniques from a fully structural LED wafer. Highly ordered periodic structural properties and morphology were confirmed by scanning electron microscopy and transmission electron mic...

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Detalles Bibliográficos
Autores principales:	Ge, Shucheng, Dai, Jiangping, Gao, Na, Lu, Shiqiang, Li, Penggang, Huang, Kai, Liu, Bin, Kang, Junyong, Zhang, Rong, Zheng, Youdou
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2019
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6529484/ https://www.ncbi.nlm.nih.gov/pubmed/31115700 http://dx.doi.org/10.1186/s11671-019-3003-1

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