Electrochemical nanoimprinting of silicon

Scalable nanomanufacturing enables the commercialization of nanotechnology, particularly in applications such as nanophotonics, silicon photonics, photovoltaics, and biosensing. Nanoimprinting lithography (NIL) was the first scalable process to introduce 3D nanopatterning of polymeric films. Despite...

Descripción completa

Detalles Bibliográficos
Autores principales: Sharstniou, Aliaksandr, Niauzorau, Stanislau, Ferreira, Placid M., Azeredo, Bruno P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: National Academy of Sciences 2019
Materias:
Physical Sciences
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6535012/
https://www.ncbi.nlm.nih.gov/pubmed/31068475
http://dx.doi.org/10.1073/pnas.1820420116

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6535012/
https://www.ncbi.nlm.nih.gov/pubmed/31068475
http://dx.doi.org/10.1073/pnas.1820420116

Ejemplares similares