A Soft Polydimethylsiloxane Liquid Metal Interdigitated Capacitor Sensor and Its Integration in a Flexible Hybrid System for On-Body Respiratory Sensing

We report on the dual mechanical and proximity sensing effect of soft-matter interdigitated (IDE) capacitor sensors, together with its modelling using finite element (FE) simulation to elucidate the sensing mechanism. The IDE capacitor is based on liquid-phase GaInSn alloy (Galinstan) embedded in a polydimethylsiloxane (PDMS) microfludics channel. The use of liquid-metal as a material for soft sensors allows theoretically infinite deformation without breaking electrical connections. The capacitance sensing is a result of E-field line disturbances from electrode deformation (mechanical effect), as well as floating electrodes in the form of human skin (proximity effect). Using the proximity effect, we show that spatial detection as large as 28 cm can be achieved. As a demonstration of a hybrid electronic system, we show that by integrating the IDE capacitors with a capacitance sensing chip, respiration rate due to a human’s chest motion can be captured, showing potential in its implementation for wearable health-monitoring.