Cargando…

2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope

The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NIR) f...

Descripción completa

Detalles Bibliográficos
Autores principales: Yao, Cheng-You, Li, Bo, Qiu, Zhen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562488/
https://www.ncbi.nlm.nih.gov/pubmed/31052229
http://dx.doi.org/10.3390/mi10050295
_version_ 1783426312213364736
author Yao, Cheng-You
Li, Bo
Qiu, Zhen
author_facet Yao, Cheng-You
Li, Bo
Qiu, Zhen
author_sort Yao, Cheng-You
collection PubMed
description The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NIR) fluorescence intraoperative confocal microscopic imaging system with a compact form factor. A silicon-on-insulator (SOI)-wafer based dicing-free microfabrication process has been developed for mass-production with high yield. Based on an in-plane comb-drive configuration, the resonant MEMS scanner performs 2D Lissajous pattern scanning with a large mechanical scanning angle (MSA, ±4°) on each axis at low driving voltage (36 V). A large field-of-view (FOV) has been achieved by using a post-objective scanning architecture of the confocal microscope. We have integrated the new MEMS scanner into a custom-made NIR fluorescence intraoperative confocal microscope with an outer diameter of 5.5 mm at its distal-end. Axial scanning has been achieved by using a piezoelectric actuator-based driving mechanism. We have successfully demonstrated ex vivo 2D imaging on human tissue specimens with up to five frames/s. The 2D resonant MEMS scanner can potentially be utilized for many applications, including multiphoton microendoscopy and wide-field endoscopy.
format Online
Article
Text
id pubmed-6562488
institution National Center for Biotechnology Information
language English
publishDate 2019
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-65624882019-06-17 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope Yao, Cheng-You Li, Bo Qiu, Zhen Micromachines (Basel) Article The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NIR) fluorescence intraoperative confocal microscopic imaging system with a compact form factor. A silicon-on-insulator (SOI)-wafer based dicing-free microfabrication process has been developed for mass-production with high yield. Based on an in-plane comb-drive configuration, the resonant MEMS scanner performs 2D Lissajous pattern scanning with a large mechanical scanning angle (MSA, ±4°) on each axis at low driving voltage (36 V). A large field-of-view (FOV) has been achieved by using a post-objective scanning architecture of the confocal microscope. We have integrated the new MEMS scanner into a custom-made NIR fluorescence intraoperative confocal microscope with an outer diameter of 5.5 mm at its distal-end. Axial scanning has been achieved by using a piezoelectric actuator-based driving mechanism. We have successfully demonstrated ex vivo 2D imaging on human tissue specimens with up to five frames/s. The 2D resonant MEMS scanner can potentially be utilized for many applications, including multiphoton microendoscopy and wide-field endoscopy. MDPI 2019-04-30 /pmc/articles/PMC6562488/ /pubmed/31052229 http://dx.doi.org/10.3390/mi10050295 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Yao, Cheng-You
Li, Bo
Qiu, Zhen
2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope
title 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope
title_full 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope
title_fullStr 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope
title_full_unstemmed 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope
title_short 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope
title_sort 2d au-coated resonant mems scanner for nir fluorescence intraoperative confocal microscope
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562488/
https://www.ncbi.nlm.nih.gov/pubmed/31052229
http://dx.doi.org/10.3390/mi10050295
work_keys_str_mv AT yaochengyou 2daucoatedresonantmemsscannerfornirfluorescenceintraoperativeconfocalmicroscope
AT libo 2daucoatedresonantmemsscannerfornirfluorescenceintraoperativeconfocalmicroscope
AT qiuzhen 2daucoatedresonantmemsscannerfornirfluorescenceintraoperativeconfocalmicroscope