Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid

A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different f...

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Detalles Bibliográficos
Autores principales: Díaz-Molina, Alex, Ruiz-Díez, Víctor, Hernando-García, Jorge, Ababneh, Abdallah, Seidel, Helmut, Sánchez-Rojas, José Luis
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562593/
https://www.ncbi.nlm.nih.gov/pubmed/31035556
http://dx.doi.org/10.3390/mi10050283

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562593/
https://www.ncbi.nlm.nih.gov/pubmed/31035556
http://dx.doi.org/10.3390/mi10050283

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