Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask

Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO(2) was employed as mask. By...

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Autores principales: Liu, Zongchen, Zhu, Tian-Fei, Wang, Yan-Feng, Ahmed, Irfan, Liu, Zhangcheng, Wen, Feng, Zhang, Xiaofan, Wang, Wei, Fan, Shuwei, Wang, Kaiyue, Wang, Hong-Xing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6566194/
https://www.ncbi.nlm.nih.gov/pubmed/31108881
http://dx.doi.org/10.3390/ma12101622
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author Liu, Zongchen
Zhu, Tian-Fei
Wang, Yan-Feng
Ahmed, Irfan
Liu, Zhangcheng
Wen, Feng
Zhang, Xiaofan
Wang, Wei
Fan, Shuwei
Wang, Kaiyue
Wang, Hong-Xing
author_facet Liu, Zongchen
Zhu, Tian-Fei
Wang, Yan-Feng
Ahmed, Irfan
Liu, Zhangcheng
Wen, Feng
Zhang, Xiaofan
Wang, Wei
Fan, Shuwei
Wang, Kaiyue
Wang, Hong-Xing
author_sort Liu, Zongchen
collection PubMed
description Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO(2) was employed as mask. By changing the mixing ratio of O(2), Ar and CF(4) during ICP etching, several submicron structures were fabricated, such as cylinders and lenses. The simulation results demonstrated that such submicron structures on a diamond’s surface can greatly enhance the photon out-coupling efficiency of embedded nitrogen-vacancy center.
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spelling pubmed-65661942019-06-17 Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask Liu, Zongchen Zhu, Tian-Fei Wang, Yan-Feng Ahmed, Irfan Liu, Zhangcheng Wen, Feng Zhang, Xiaofan Wang, Wei Fan, Shuwei Wang, Kaiyue Wang, Hong-Xing Materials (Basel) Article Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO(2) was employed as mask. By changing the mixing ratio of O(2), Ar and CF(4) during ICP etching, several submicron structures were fabricated, such as cylinders and lenses. The simulation results demonstrated that such submicron structures on a diamond’s surface can greatly enhance the photon out-coupling efficiency of embedded nitrogen-vacancy center. MDPI 2019-05-17 /pmc/articles/PMC6566194/ /pubmed/31108881 http://dx.doi.org/10.3390/ma12101622 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Liu, Zongchen
Zhu, Tian-Fei
Wang, Yan-Feng
Ahmed, Irfan
Liu, Zhangcheng
Wen, Feng
Zhang, Xiaofan
Wang, Wei
Fan, Shuwei
Wang, Kaiyue
Wang, Hong-Xing
Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask
title Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask
title_full Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask
title_fullStr Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask
title_full_unstemmed Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask
title_short Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask
title_sort fabrication of diamond submicron lenses and cylinders by icp etching technique with sio(2) balls mask
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6566194/
https://www.ncbi.nlm.nih.gov/pubmed/31108881
http://dx.doi.org/10.3390/ma12101622
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