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Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask

Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO(2) was employed as mask. By...

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Detalles Bibliográficos
Autores principales:	Liu, Zongchen, Zhu, Tian-Fei, Wang, Yan-Feng, Ahmed, Irfan, Liu, Zhangcheng, Wen, Feng, Zhang, Xiaofan, Wang, Wei, Fan, Shuwei, Wang, Kaiyue, Wang, Hong-Xing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6566194/ https://www.ncbi.nlm.nih.gov/pubmed/31108881 http://dx.doi.org/10.3390/ma12101622

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