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Analytical Prediction of Subsurface Damages and Surface Quality in Vibration-Assisted Polishing Process of Silicon Carbide Ceramics
Subsurface damages and surface roughness are two significant parameters which determine the performance of silicon carbide (SiC) ceramics. Subsurface damages (SSD) induced by conventional polishing could seriously affect the service life of the workpiece. To address this problem, vibration-assisted...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6566795/ https://www.ncbi.nlm.nih.gov/pubmed/31137672 http://dx.doi.org/10.3390/ma12101690 |