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Analytical Prediction of Subsurface Damages and Surface Quality in Vibration-Assisted Polishing Process of Silicon Carbide Ceramics

Subsurface damages and surface roughness are two significant parameters which determine the performance of silicon carbide (SiC) ceramics. Subsurface damages (SSD) induced by conventional polishing could seriously affect the service life of the workpiece. To address this problem, vibration-assisted...

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Detalles Bibliográficos
Autores principales:	Gu, Yan, Zhou, Yan, Lin, Jieqiong, Yi, Allen, Kang, Mingshuo, Lu, Hao, Xu, Zisu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6566795/ https://www.ncbi.nlm.nih.gov/pubmed/31137672 http://dx.doi.org/10.3390/ma12101690

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