Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions

This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer laye...

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Detalles Bibliográficos
Autores principales: Banerjee, Aishwaryadev, Khan, Shakir-Ul Haque, Broadbent, Samuel, Likhite, Rugved, Looper, Ryan, Kim, Hanseup, Mastrangelo, Carlos H.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567118/
https://www.ncbi.nlm.nih.gov/pubmed/31083457
http://dx.doi.org/10.3390/nano9050727

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567118/
https://www.ncbi.nlm.nih.gov/pubmed/31083457
http://dx.doi.org/10.3390/nano9050727

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