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Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions
This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer laye...
Autores principales: | Banerjee, Aishwaryadev, Khan, Shakir-Ul Haque, Broadbent, Samuel, Likhite, Rugved, Looper, Ryan, Kim, Hanseup, Mastrangelo, Carlos H. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567118/ https://www.ncbi.nlm.nih.gov/pubmed/31083457 http://dx.doi.org/10.3390/nano9050727 |
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