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Electrical Properties and Interfacial Issues of HfO(2)/Ge MIS Capacitors Characterized by the Thickness of La(2)O(3) Interlayer

Effects of the La(2)O(3) passivation layer thickness on the interfacial properties of high-k/Ge interface are investigated systematically. In a very thin range (0~15 cycles), the increase of La(2)O(3) passivation layer deposition cycles improves the surface smoothness of HfO(2)/Ge structures. The ca...

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Detalles Bibliográficos
Autores principales:	Zhao, Lu, Liu, Hongxia, Wang, Xing, Wang, Yongte, Wang, Shulong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Letter
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567279/ https://www.ncbi.nlm.nih.gov/pubmed/31060261 http://dx.doi.org/10.3390/nano9050697

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