A Resonant Pressure Microsensor with the Measurement Range of 1 MPa Based on Sensitivities Balanced Dual Resonators

This paper presents a resonant pressure microsensor with the measurement range of 1 MPa suitable for the soaring demands of industrial gas pressure calibration equipment. The proposed microsensor consists of an SOI layer as a sensing element and a glass cap for vacuum packaging. The sensing elements...

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Detalles Bibliográficos
Autores principales: Lu, Yulan, Yan, Pengcheng, Xiang, Chao, Chen, Deyong, Wang, Junbo, Xie, Bo, Chen, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567331/
https://www.ncbi.nlm.nih.gov/pubmed/31100922
http://dx.doi.org/10.3390/s19102272

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567331/
https://www.ncbi.nlm.nih.gov/pubmed/31100922
http://dx.doi.org/10.3390/s19102272

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