Ag/Au Alloyed Nanoislands for Wafer-Level Plasmonic Color Filter Arrays

Alloyed metals in nanoscale exhibit some intriguing features that are absent in mono-metallic nanostructures. Here we report silver and gold alloyed nanoislands with high tunability of localized surface plasmon resonance (LSPR) wavelength in the visible range for wafer-level plasmonic color filter arrays. The nanofabrication includes two simple steps of concurrent thermal evaporation of Ag and Au grains and solid-state dewetting of the as-deposited nanocomposite thin film. The alloy ratio during the evaporation precisely tunes the LSPR wavelengths within 415–609 nm spectrum range. The elemental composition map reveals that alloyed nanoislands are completely miscible while preserving uniform size, regardless of the alloy ratio. Besides, the multiple lift-off processes and thermal dewetting of Ag/Au nanocomposite thin films successfully demonstrate the wafer-level nanofabrication of plasmonic color filter mosaic. Each plasmonic color pixel comprises different alloy ratio and efficiently transmits colors ranging from cyan, yellow, and magenta. The transmission spectra transposed onto a CIE 1931 color map show comparable color diversity to the plasmonic color filters fabricated by conventional e-beam lithographic techniques. This novel method provides a new direction for large-scale and visible plasmonic color filter arrays in advanced display or imaging applications.