Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating

Cylindrical shell fused silica resonators coated with 8 axisymmetric Pb(Zr(0.53)Ti(0.47))O(3) (PZT) thin film electrodes (thickness ~2 μm) were reported. The resonators were firstly designed and fabricated, then annealed and processed by chemical etching to increase mechanical quality factor (Q fact...

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Autores principales: Luo, Yiming, Qu, Tianliang, Cui, Yan, Pan, Yao, Yu, Menglin, Luo, Hui, Jia, Yonglei, Tan, Zhongqi, Liu, Jianping, Zhang, Bin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6603186/
https://www.ncbi.nlm.nih.gov/pubmed/31263180
http://dx.doi.org/10.1038/s41598-019-45180-5
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author Luo, Yiming
Qu, Tianliang
Cui, Yan
Pan, Yao
Yu, Menglin
Luo, Hui
Jia, Yonglei
Tan, Zhongqi
Liu, Jianping
Zhang, Bin
author_facet Luo, Yiming
Qu, Tianliang
Cui, Yan
Pan, Yao
Yu, Menglin
Luo, Hui
Jia, Yonglei
Tan, Zhongqi
Liu, Jianping
Zhang, Bin
author_sort Luo, Yiming
collection PubMed
description Cylindrical shell fused silica resonators coated with 8 axisymmetric Pb(Zr(0.53)Ti(0.47))O(3) (PZT) thin film electrodes (thickness ~2 μm) were reported. The resonators were firstly designed and fabricated, then annealed and processed by chemical etching to increase mechanical quality factor (Q factor) of resonators, which achieved as high as 2.89 million for n = 2 wineglass modes after being coated with PZT thin film electrodes. The n = 2 wineglass modes of the resonators were driven by PZT thin film electrodes in experiment and simulation with fine vibratory shape, which demonstrated the feasibility of the cylindrical fused silica resonator driven by PZT thin film electrodes. The application of PZT thin film electrodes to drive and detect cylindrical shell fused silica resonator can significantly improve Q factor of resonators and improve the sensitivity of Coriolis Vibratory Gyroscope (CVG).
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spelling pubmed-66031862019-07-14 Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating Luo, Yiming Qu, Tianliang Cui, Yan Pan, Yao Yu, Menglin Luo, Hui Jia, Yonglei Tan, Zhongqi Liu, Jianping Zhang, Bin Sci Rep Article Cylindrical shell fused silica resonators coated with 8 axisymmetric Pb(Zr(0.53)Ti(0.47))O(3) (PZT) thin film electrodes (thickness ~2 μm) were reported. The resonators were firstly designed and fabricated, then annealed and processed by chemical etching to increase mechanical quality factor (Q factor) of resonators, which achieved as high as 2.89 million for n = 2 wineglass modes after being coated with PZT thin film electrodes. The n = 2 wineglass modes of the resonators were driven by PZT thin film electrodes in experiment and simulation with fine vibratory shape, which demonstrated the feasibility of the cylindrical fused silica resonator driven by PZT thin film electrodes. The application of PZT thin film electrodes to drive and detect cylindrical shell fused silica resonator can significantly improve Q factor of resonators and improve the sensitivity of Coriolis Vibratory Gyroscope (CVG). Nature Publishing Group UK 2019-07-01 /pmc/articles/PMC6603186/ /pubmed/31263180 http://dx.doi.org/10.1038/s41598-019-45180-5 Text en © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Luo, Yiming
Qu, Tianliang
Cui, Yan
Pan, Yao
Yu, Menglin
Luo, Hui
Jia, Yonglei
Tan, Zhongqi
Liu, Jianping
Zhang, Bin
Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating
title Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating
title_full Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating
title_fullStr Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating
title_full_unstemmed Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating
title_short Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating
title_sort cylindrical fused silica resonators driven by pzt thin film electrodes with q factor achieving 2.89 million after coating
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6603186/
https://www.ncbi.nlm.nih.gov/pubmed/31263180
http://dx.doi.org/10.1038/s41598-019-45180-5
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