Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating

Cylindrical shell fused silica resonators coated with 8 axisymmetric Pb(Zr(0.53)Ti(0.47))O(3) (PZT) thin film electrodes (thickness ~2 μm) were reported. The resonators were firstly designed and fabricated, then annealed and processed by chemical etching to increase mechanical quality factor (Q fact...

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Detalles Bibliográficos
Autores principales: Luo, Yiming, Qu, Tianliang, Cui, Yan, Pan, Yao, Yu, Menglin, Luo, Hui, Jia, Yonglei, Tan, Zhongqi, Liu, Jianping, Zhang, Bin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6603186/
https://www.ncbi.nlm.nih.gov/pubmed/31263180
http://dx.doi.org/10.1038/s41598-019-45180-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6603186/
https://www.ncbi.nlm.nih.gov/pubmed/31263180
http://dx.doi.org/10.1038/s41598-019-45180-5

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