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Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating
Cylindrical shell fused silica resonators coated with 8 axisymmetric Pb(Zr(0.53)Ti(0.47))O(3) (PZT) thin film electrodes (thickness ~2 μm) were reported. The resonators were firstly designed and fabricated, then annealed and processed by chemical etching to increase mechanical quality factor (Q fact...
| Autores principales: | , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6603186/ https://www.ncbi.nlm.nih.gov/pubmed/31263180 http://dx.doi.org/10.1038/s41598-019-45180-5 |