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Exploiting Direct Laser Writing for Hydrogel Integration into Fragile Microelectromechanical Systems

The integration of chemo-responsive hydrogels into fragile microelectromechanical systems (MEMS) with reflective surfaces in the micron to submicron range is presented. Direct laser writing (DLW) for 3D microstructuring of chemoresponsive “smart” hydrogels on sensitive microstructures is demonstrate...

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Detalles Bibliográficos
Autores principales:	Menges, Julian, Klingel, Steffen, Oesterschulze, Egbert, Bart, Hans-Jörg
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6603525/ https://www.ncbi.nlm.nih.gov/pubmed/31159238 http://dx.doi.org/10.3390/s19112494

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