A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride

The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as t...

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Detalles Bibliográficos
Autores principales: Ranacher, Christian, Consani, Cristina, Tortschanoff, Andreas, Rauter, Lukas, Holzmann, Dominik, Fleury, Clement, Stocker, Gerald, Fant, Andrea, Schaunig, Herbert, Irsigler, Peter, Grille, Thomas, Jakoby, Bernhard
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6603752/
https://www.ncbi.nlm.nih.gov/pubmed/31159340
http://dx.doi.org/10.3390/s19112513

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