Microwave Monitoring of Atmospheric Corrosion of Interconnects

Traditional metrology has been unable to adequately address the reliability needs of emerging integrated circuits at the nano scale; thus, new metrology and techniques are needed. In this paper, we use microwave propagation characteristics (insertion loss and dispersion) to study the atmospheric int...

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Autores principales: Amoah, Papa K., Veksler, Dmitry, Sunday, Christopher E., Moreau, Stéphane, Bouchu, David, Obeng, Yaw S.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6604628/
https://www.ncbi.nlm.nih.gov/pubmed/31275732
http://dx.doi.org/10.1149/2.0181812jss
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author Amoah, Papa K.
Veksler, Dmitry
Sunday, Christopher E.
Moreau, Stéphane
Bouchu, David
Obeng, Yaw S.
author_facet Amoah, Papa K.
Veksler, Dmitry
Sunday, Christopher E.
Moreau, Stéphane
Bouchu, David
Obeng, Yaw S.
author_sort Amoah, Papa K.
collection PubMed
description Traditional metrology has been unable to adequately address the reliability needs of emerging integrated circuits at the nano scale; thus, new metrology and techniques are needed. In this paper, we use microwave propagation characteristics (insertion loss and dispersion) to study the atmospheric interconnect corrosion under accelerated stress conditions. The results presented in this work indicate that the corrosion resilience of the test device is limited by the thermal aging of the passivation layer.
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spelling pubmed-66046282019-07-02 Microwave Monitoring of Atmospheric Corrosion of Interconnects Amoah, Papa K. Veksler, Dmitry Sunday, Christopher E. Moreau, Stéphane Bouchu, David Obeng, Yaw S. ECS J Solid State Sci Technol Article Traditional metrology has been unable to adequately address the reliability needs of emerging integrated circuits at the nano scale; thus, new metrology and techniques are needed. In this paper, we use microwave propagation characteristics (insertion loss and dispersion) to study the atmospheric interconnect corrosion under accelerated stress conditions. The results presented in this work indicate that the corrosion resilience of the test device is limited by the thermal aging of the passivation layer. 2018 /pmc/articles/PMC6604628/ /pubmed/31275732 http://dx.doi.org/10.1149/2.0181812jss Text en This is an open access article distributed under the terms of the Creative Commons Attribution 4.0 License (CC BY, http://creativecommons.org/licenses/by/4.0/), which permits unrestricted reuse of the work in any medium, provided the original work is properly cited. [DOI: 10.1149/2.0181812jss]
spellingShingle Article
Amoah, Papa K.
Veksler, Dmitry
Sunday, Christopher E.
Moreau, Stéphane
Bouchu, David
Obeng, Yaw S.
Microwave Monitoring of Atmospheric Corrosion of Interconnects
title Microwave Monitoring of Atmospheric Corrosion of Interconnects
title_full Microwave Monitoring of Atmospheric Corrosion of Interconnects
title_fullStr Microwave Monitoring of Atmospheric Corrosion of Interconnects
title_full_unstemmed Microwave Monitoring of Atmospheric Corrosion of Interconnects
title_short Microwave Monitoring of Atmospheric Corrosion of Interconnects
title_sort microwave monitoring of atmospheric corrosion of interconnects
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6604628/
https://www.ncbi.nlm.nih.gov/pubmed/31275732
http://dx.doi.org/10.1149/2.0181812jss
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