Metrology characterization of ultraprecise bendable mirrors for the European XFEL: from offsite calibration to installation and commissioning

The European XFEL requires long and ultraflat X-ray mirrors of high precision for the beam offset and distribution system [Altarelli et al. (2006 ▸), XFEL Technical Design Report, DESY 2006-097. DESY, Hamburg, Germany]. A general specification of the beam transport mirrors is a length of up to 950 mm and an optical surface with a deviation from a perfectly flat surface of <30 nm peak-to-valley and a figure error of <2 nm peak-to-valley. From a production point of view, such a mirror cannot be easily fabricated so, in each beamline, it is foreseen to have at least one mirror with bending capabilities. In this way, it is possible to correct the residual divergence of the beam in order to focus it in the correct position with high accuracy and repeatability. This is practically implemented using a mechanical bender in which the mirror is mounted and bent through a motorized actuator. One such system was characterized in the metrology lab using a large-aperture Fizeau interferometer and a capacitive sensor. It was then installed in the beamline and calibrated again using the X-ray beam. Here, the procedure is described and the two different methods are compared, stressing the differences and the possible explanations and improvements.