An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method

This work presents a novel and compact method for simultaneously measuring errors in linear displacement and vertical straightness of a moving linear air-bearing stage using 3D sinusoidal-groove linear reflective grating and a novel triangular wave-based sequence signal analysis method. The new sche...

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Detalles Bibliográficos
Autores principales: Tsai, Hsiu-An, Lo, Yu-Lung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6631855/
https://www.ncbi.nlm.nih.gov/pubmed/31238542
http://dx.doi.org/10.3390/s19122816

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6631855/
https://www.ncbi.nlm.nih.gov/pubmed/31238542
http://dx.doi.org/10.3390/s19122816

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