Controlled Nanoscale Electrohydrodynamic Patterning Using Mesopatterned Template

[Image: see text] We report the path for a possible fabrication of an array of nanogrooves, by electro-hydrodynamic instability-mediated patterning of a thin polymer film using a patterned stamp with much larger features. Using a predictive computational model based on finite element method, we find the route to control the coalescence of initial instabilities that arise with the onset of spatially varying DC electric field generated through topographical patterns in the top electrode. These quasi-steady structures are shown to evolve with the electrostatic and geometric nature of the two-electrode system and are of a stable intermediate during the process of feature replication, under each electrode feature. We identify conditions to obtain nanogrooves for a range of operating conditions. Such simulations are likely to guide experiments, where simultaneous optimization of multiple parameters to fabricate features with lateral dimension smaller than that of the electrode patterns is challenging.