New Heteroleptic Cobalt Precursors for Deposition of Cobalt-Based Thin Films

[Image: see text] A new series of heteroleptic complexes of cobalt were synthesized using aminoalkoxide and β-diketonate ligands. The complexes, [Co(dmamp)(acac)](2) (3), [Co(dmamp)(tfac)](2) (4), [Co(dmamp)(hfac)](2) (5), [Co(dmamp)(tmhd)](2) (6), and [Co(dmamb)(tmhd)](2) (7), were prepared by two-step substitution reactions and studied using Fourier transform infrared spectroscopy, mass spectrometry, elemental analysis, and thermogravimetric analysis (TGA). Complexes 3–7 displayed dimeric molecular structures for all of the complexes with cobalt metal centers interconnected by μ(2)-O bonding by the alkoxy oxygen atom. TGA and a thermal study of the complexes displayed high volatilities and stabilities for complexes 6 and 7, with sublimation temperatures of 120 °C/0.5 Torr and 130 °C/0.5 Torr, respectively.