Molecular Layer Deposition Using Ring-Opening Reactions: Molecular Modeling of the Film Growth and the Effects of Hydrogen Peroxide

[Image: see text] Novel coating materials are constantly needed for current and future applications in the area of microelectronics, biocompatible materials, and energy-related devices. Molecular layer deposition (MLD) is answering this cry and is an increasingly important coating method for organic...

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Detalles Bibliográficos
Autores principales: Keskiväli, Laura, Putkonen, Matti, Puhakka, Eini, Kenttä, Eija, Kint, Jeroen, Ramachandran, Ranjith K., Detavernier, Christophe, Simell, Pekka
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2018
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6644646/
https://www.ncbi.nlm.nih.gov/pubmed/31458876
http://dx.doi.org/10.1021/acsomega.8b01301

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