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Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement

[Image: see text] Synthetic diamond films are routinely grown using chemical vapor deposition (CVD) techniques. Due to their extraordinary combination of intrinsic properties, they are used as the functional layers in various bio-optoelectronic devices. It is a challenge to grow the dimensional laye...

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Autores principales: Varga, Marián, Potocký, Štepán, Domonkos, Mária, Ižák, Tibor, Babčenko, Oleg, Kromka, Alexander
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2019
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6648511/
https://www.ncbi.nlm.nih.gov/pubmed/31459933
http://dx.doi.org/10.1021/acsomega.9b00323
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author Varga, Marián
Potocký, Štepán
Domonkos, Mária
Ižák, Tibor
Babčenko, Oleg
Kromka, Alexander
author_facet Varga, Marián
Potocký, Štepán
Domonkos, Mária
Ižák, Tibor
Babčenko, Oleg
Kromka, Alexander
author_sort Varga, Marián
collection PubMed
description [Image: see text] Synthetic diamond films are routinely grown using chemical vapor deposition (CVD) techniques. Due to their extraordinary combination of intrinsic properties, they are used as the functional layers in various bio-optoelectronic devices. It is a challenge to grow the dimensional layers or porous structures that are required. This study reviews the fabrication of various porous diamond-based structures using linear antenna microwave plasma (LAMWP) chemical vapor deposition (CVD), a low-cost technology for growing diamond films over a large area (>1 m(2)) at low pressure (<100 Pa) and at low temperature (even at 350 °C). From a technological point of view, two different approaches, i.e., templated diamond growth using three different prestructured (macro-, micro-, and nanosized) porous substrates and direct bottom-up growth of ultra-nanoporous diamond (block-stone and dendritelike) films, are successfully employed to form diamond-based structures with controlled porosity and an enhanced surface area. As a bottom-up strategy, the LAMWP CVD system allows diamond growth at as high as 80% CO(2) in the CH(4)/CO(2)/H(2) gas mixture. In summary, the low-pressure and cold plasma conditions in the LAMWP system facilitate the growth on three-dimensionally prestructured substrates of various materials that naturally form porous self-standing diamond structures.
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spelling pubmed-66485112019-08-27 Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement Varga, Marián Potocký, Štepán Domonkos, Mária Ižák, Tibor Babčenko, Oleg Kromka, Alexander ACS Omega [Image: see text] Synthetic diamond films are routinely grown using chemical vapor deposition (CVD) techniques. Due to their extraordinary combination of intrinsic properties, they are used as the functional layers in various bio-optoelectronic devices. It is a challenge to grow the dimensional layers or porous structures that are required. This study reviews the fabrication of various porous diamond-based structures using linear antenna microwave plasma (LAMWP) chemical vapor deposition (CVD), a low-cost technology for growing diamond films over a large area (>1 m(2)) at low pressure (<100 Pa) and at low temperature (even at 350 °C). From a technological point of view, two different approaches, i.e., templated diamond growth using three different prestructured (macro-, micro-, and nanosized) porous substrates and direct bottom-up growth of ultra-nanoporous diamond (block-stone and dendritelike) films, are successfully employed to form diamond-based structures with controlled porosity and an enhanced surface area. As a bottom-up strategy, the LAMWP CVD system allows diamond growth at as high as 80% CO(2) in the CH(4)/CO(2)/H(2) gas mixture. In summary, the low-pressure and cold plasma conditions in the LAMWP system facilitate the growth on three-dimensionally prestructured substrates of various materials that naturally form porous self-standing diamond structures. American Chemical Society 2019-05-14 /pmc/articles/PMC6648511/ /pubmed/31459933 http://dx.doi.org/10.1021/acsomega.9b00323 Text en Copyright © 2019 American Chemical Society This is an open access article published under an ACS AuthorChoice License (http://pubs.acs.org/page/policy/authorchoice_termsofuse.html) , which permits copying and redistribution of the article or any adaptations for non-commercial purposes.
spellingShingle Varga, Marián
Potocký, Štepán
Domonkos, Mária
Ižák, Tibor
Babčenko, Oleg
Kromka, Alexander
Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement
title Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement
title_full Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement
title_fullStr Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement
title_full_unstemmed Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement
title_short Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement
title_sort great variety of man-made porous diamond structures: pulsed microwave cold plasma system with a linear antenna arrangement
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6648511/
https://www.ncbi.nlm.nih.gov/pubmed/31459933
http://dx.doi.org/10.1021/acsomega.9b00323
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