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Micrometer Scale Resolution Limit of a Fiber-Coupled Electro-Optic Probe

We present the practical resolution limit of a fine electrical structure based on a fiber-coupled electro-optic probing system. The spatial resolution limit was experimentally evaluated on the sub-millimeter to micrometer scale of planar electrical transmission lines. The electrical lines were fabri...

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Detalles Bibliográficos
Autores principales:	Hong, Young-Pyo, Lee, Kyung-Min, Kim, Sung-Yeol, Lim, Meehyun, Kim, Taekjin, Yong, Hyung-Jung, Lee, Dong-Joon
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6651240/ https://www.ncbi.nlm.nih.gov/pubmed/31261698 http://dx.doi.org/10.3390/s19132874

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