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Fabrication of Tapered Micropillars with High Aspect-Ratio Based on Deep X-ray Lithography
In this study, a fabrication method of tapered microstructures with high aspect ratio was proposed by deep X-ray lithography. Tapered microstructures with several hundred micrometers and high aspect ratio are demanded owing to the high applicability in the fields of various microelectromechanical sy...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6651585/ https://www.ncbi.nlm.nih.gov/pubmed/31247998 http://dx.doi.org/10.3390/ma12132056 |