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Fast Acoustic Light Sculpting for On‐Demand Maskless Lithography
Light interference is the primary enabler of a number of optical maskless techniques for the large‐scale processing of materials at the nanoscale. However, methods controlling interference phenomena can be limited in speed, ease of implementation, or the selection of pattern designs. Here, an optofl...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
John Wiley and Sons Inc.
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6662050/ https://www.ncbi.nlm.nih.gov/pubmed/31380209 http://dx.doi.org/10.1002/advs.201900304 |