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Deposition of Silicon-Based Stacked Layers for Flexible Encapsulation of Organic Light Emitting Diodes

In this study, inorganic silicon oxide (SiO(x))/organic silicon (SiC(x)H(y)) stacked layers were deposited by a radio frequency inductively coupled plasma chemical vapor deposition system as a gas diffusion barrier for organic light-emitting diodes (OLEDs). The effects of thicknesses of SiO(x) and S...

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Detalles Bibliográficos
Autores principales:	Hsu, Chia-Hsun, Lin, Yang-Shih, Wu, Hsin-Yu, Zhang, Xiao-Ying, Wu, Wan-Yu, Lien, Shui-Yang, Wuu, Dong-Sing, Jiang, Yeu-Long
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6669626/ https://www.ncbi.nlm.nih.gov/pubmed/31340501 http://dx.doi.org/10.3390/nano9071053

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