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Investigation of Acoustic Injection on the MPU6050 Accelerometer

Acoustic injection is one of the most dangerous ways of causing micro-electro–mechanical systems (MEMS) failures. In this paper, the failure mechanism of acoustic injection on the microprocessor unit 6050 (MPU6050) accelerometer is investigated by both experiment and simulation. A testing system was...

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Detalles Bibliográficos
Autores principales:	Zhang, Yunfan, Li, Hui, Shen, Shengnan, Zhang, Guohao, Yang, Yun, Liu, Zefeng, Xie, Qisen, Gao, Chaofu, Zhang, Pengfei, Zhao, Wu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679069/ https://www.ncbi.nlm.nih.gov/pubmed/31336934 http://dx.doi.org/10.3390/s19143083

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