A Review of the Capacitive MEMS for Seismology

MEMS (Micro Electro-Mechanical Systems) sensors enable a vast range of applications: among others, the use of MEMS accelerometers for seismology related applications has been emerging considerably in the last decade. In this paper, we provide a comprehensive review of the capacitive MEMS acceleromet...

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Detalles Bibliográficos
Autores principales: D’Alessandro, Antonino, Scudero, Salvatore, Vitale, Giovanni
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679216/
https://www.ncbi.nlm.nih.gov/pubmed/31336990
http://dx.doi.org/10.3390/s19143093

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679216/
https://www.ncbi.nlm.nih.gov/pubmed/31336990
http://dx.doi.org/10.3390/s19143093

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