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Back-Side Polymer-Coated Solid-State Nanopore Sensors
[Image: see text] We systematically investigated the influence of polymer coating on temporal resolution of solid-state nanopores. We fabricated a Si(3)N(4) nanopore integrated with a polyimide sheet partially covering the substrate surface. Upon detecting the nanoparticles dispersed in an electroly...
Autores principales: | Leong, Iat Wai, Tsutsui, Makusu, Nakada, Tomoko, Taniguchi, Masateru, Washio, Takashi, Kawai, Tomoji |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2019
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6682124/ https://www.ncbi.nlm.nih.gov/pubmed/31460376 http://dx.doi.org/10.1021/acsomega.9b00946 |
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