Unraveling structural and compositional information in 3D FinFET electronic devices

Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a technique capable of full characterization, particularly their dopant distribu...

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Detalles Bibliográficos
Autores principales: Trombini, Henrique, Marmitt, Gabriel Guterres, Alencar, Igor, Baptista, Daniel Lorscheitter, Reboh, Shay, Mazen, Frédéric, Pinheiro, Rafael Bortolin, Sanchez, Dario Ferreira, Senna, Carlos Alberto, Archanjo, Bráulio Soares, Achete, Carlos Alberto, Grande, Pedro Luis
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6691105/
https://www.ncbi.nlm.nih.gov/pubmed/31406211
http://dx.doi.org/10.1038/s41598-019-48117-0

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