Analytics-statistics mixed training and its fitness to semisupervised manufacturing

While there have been many studies using machine learning (ML) algorithms to predict process outcomes and device performance in semiconductor manufacturing, the extensively developed technology computer-aided design (TCAD) physical models should play a more significant role in conjunction with ML. W...

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Detalles Bibliográficos
Autores principales: Parashar, Parag, Chen, Chun Han, Akbar, Chandni, Fu, Sze Ming, Rawat, Tejender S., Pratik, Sparsh, Butola, Rajat, Chen, Shih Han, Lin, Albert S.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Public Library of Science 2019
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6692054/
https://www.ncbi.nlm.nih.gov/pubmed/31408473
http://dx.doi.org/10.1371/journal.pone.0220607

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