Subsurface imaging of flexible circuits via contact resonance atomic force microscopy

Subsurface imaging of Au circuit structures embedded in poly(methyl methacrylate) (PMMA) thin films with a cover thickness ranging from 52 to 653 nm was carried out by using contact resonance atomic force microscopy (CR-AFM). The mechanical difference of the embedded metal layer leads to an obvious...

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Detalles Bibliográficos
Autores principales: Wang, Wenting, Ma, Chengfu, Chen, Yuhang, Zheng, Lei, Liu, Huarong, Chu, Jiaru
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2019
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6693404/
https://www.ncbi.nlm.nih.gov/pubmed/31467825
http://dx.doi.org/10.3762/bjnano.10.159

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6693404/
https://www.ncbi.nlm.nih.gov/pubmed/31467825
http://dx.doi.org/10.3762/bjnano.10.159

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