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Subsurface imaging of flexible circuits via contact resonance atomic force microscopy
Subsurface imaging of Au circuit structures embedded in poly(methyl methacrylate) (PMMA) thin films with a cover thickness ranging from 52 to 653 nm was carried out by using contact resonance atomic force microscopy (CR-AFM). The mechanical difference of the embedded metal layer leads to an obvious...
Autores principales: | Wang, Wenting, Ma, Chengfu, Chen, Yuhang, Zheng, Lei, Liu, Huarong, Chu, Jiaru |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Beilstein-Institut
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6693404/ https://www.ncbi.nlm.nih.gov/pubmed/31467825 http://dx.doi.org/10.3762/bjnano.10.159 |
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